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Volumn 32, Issue 2, 2008, Pages 148-152

Development of a microgripping system for handling of microcomponents

Author keywords

Microgripper; Micromanipulation; Microsystems

Indexed keywords

MICROMANIPULATORS; OPTICAL MICROSCOPY; POSITION CONTROL; SOFT MAGNETIC MATERIALS; STAINLESS STEEL; THERMOCOUPLES;

EID: 39049134840     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.precisioneng.2007.07.002     Document Type: Article
Times cited : (35)

References (8)
  • 1
    • 0036643922 scopus 로고    scopus 로고
    • Electrostatically driven microgripper
    • Volland B.E., et al. Electrostatically driven microgripper. Microelectron Eng 61/62 (2002) 1015-1023
    • (2002) Microelectron Eng , vol.61-62 , pp. 1015-1023
    • Volland, B.E.1
  • 2
    • 0032594989 scopus 로고    scopus 로고
    • Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology
    • Debeda H., et al. Development of miniaturized piezoelectric actuators for optical applications realized using LIGA technology. J Microelectromech Syst 8 (1999) 258
    • (1999) J Microelectromech Syst , vol.8 , pp. 258
    • Debeda, H.1
  • 3
    • 0038346498 scopus 로고    scopus 로고
    • Optimization of an electro-thermally and laterally driven microactuator
    • Lee C.C., et al. Optimization of an electro-thermally and laterally driven microactuator. Microsyst Technol 9 (2003) 331
    • (2003) Microsyst Technol , vol.9 , pp. 331
    • Lee, C.C.1
  • 4
    • 0042874104 scopus 로고    scopus 로고
    • On a tunable bistable MEMS-theory and experiment
    • Saif M.T. On a tunable bistable MEMS-theory and experiment. J Microelectromech Syst 9 (2000) 157
    • (2000) J Microelectromech Syst , vol.9 , pp. 157
    • Saif, M.T.1
  • 5
    • 79956012154 scopus 로고    scopus 로고
    • Development and application of laterally driven electromagnetic microactuator
    • Ko J.S., et al. Development and application of laterally driven electromagnetic microactuator. Appl Phys Lett 81 (2002) 547
    • (2002) Appl Phys Lett , vol.81 , pp. 547
    • Ko, J.S.1
  • 7
    • 31644433695 scopus 로고    scopus 로고
    • Microgripper: design, finite element analysis and laser microfabrication
    • Bordatchev E.V., et al. Microgripper: design, finite element analysis and laser microfabrication. Proceedings of the ICMENS'03, IEEE (2003)
    • (2003) Proceedings of the ICMENS'03, IEEE
    • Bordatchev, E.V.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.