Deuterated Diamond Like Carbon films (DDLC): Mechanical properties in relation with microstructure

Surface and Coatings Technology

Volumn 202, Issue 11, 2008, Pages 2349-2353

  Mathis, N ^a   Meunier, C ^a   Guibert, G ^b   Mikhailov, S ^b   Berthout, G ^c  

^a UNIVERSITÉ DE FRANCHE COMTÉ   (France)

^b HE Arc ^*  (Switzerland)

^c CSM Instruments SA   (Switzerland)

Author keywords

Deuterium; DLC; Hydrogen; Nano hardness; Nano scratch; PECVD

Indexed keywords

ADHESION; AMORPHOUS CARBON; CRYSTAL MICROSTRUCTURE; DEUTERIUM; GLASS; HYDROGEN; NANOHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS;

CHEMICAL COMPOSITION; NANO-SCRATCH;

DIAMOND LIKE CARBON FILMS;

ADHESION; AMORPHOUS CARBON; CRYSTAL MICROSTRUCTURE; DEUTERIUM; DIAMOND LIKE CARBON FILMS; GLASS; HYDROGEN; NANOHARDNESS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS;

EID: 38949161190     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.09.034     Document Type: Article

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