IAD process for optical coating application

Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering

Volumn 36, Issue 6, 2007, Pages 896-898

  Wang, Li ^a   Cheng, Xin Bin ^a   Wang, Zhan Shan ^a   Tang, Qi ^b   Fan, Bin ^b  

^a TONGJI UNIVERSITY   (China)

^b Optorun Co Ltd   (Japan)

Author keywords

Ion assisted deposition; Ion beam cleaning; Ion energy transfer

Indexed keywords

EID: 38949119702     PISSN: 10072276     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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