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Volumn 364-366 I, Issue , 2008, Pages 607-612

Fabrication of large-area imprint mold with high-aspect-ratio nanotip arrays of sub-micron diameter

Author keywords

Electron cyclotron resonance plasma; Nanoimprint; Nanotip

Indexed keywords

DISPLAY DEVICES; OPTICAL SYSTEMS;

EID: 38849130593     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper
Times cited : (1)

References (15)
  • 2
    • 0012752163 scopus 로고    scopus 로고
    • S. Y. Chou, P. R. Krauss, W. Zhang and Lei Zhuang: J. Vac. Sci. Technol. B 15 (1997), p. 2897
    • S. Y. Chou, P. R. Krauss, W. Zhang and Lei Zhuang: J. Vac. Sci. Technol. B Vol. 15 (1997), p. 2897
  • 10
    • 28844498343 scopus 로고    scopus 로고
    • M. S. Park and J. K. Kim: Langmuir, Vol. 21 (24) (2005), p. 11404
    • (2005) Langmuir , vol.21 , Issue.24 , pp. 11404
    • Park, M.S.1    Kim, J.K.2
  • 11
    • 38849157418 scopus 로고    scopus 로고
    • V. Boerner, S. Abbott, B. Bläsi, A. Gombert and W. Hoßfeld: SID Symp. Digest 34(1) (2003), p. 68
    • V. Boerner, S. Abbott, B. Bläsi, A. Gombert and W. Hoßfeld: SID Symp. Digest Vol. 34(1) (2003), p. 68
  • 14
    • 0004028474 scopus 로고    scopus 로고
    • Nanomaterials and magnetic thin films, Academic Press
    • H. S. Nalwa, in: Handbook of thin film materials. Vol. 5: Nanomaterials and magnetic thin films, Academic Press, 2002
    • (2002) Handbook of thin film materials , vol.5
    • Nalwa, H.S.1
  • 15
    • 38849118197 scopus 로고    scopus 로고
    • H. Schift and L. J. Heyderman, in: book series on Nanostructure Science and Technology, Kluwer Academic / Plenum Publishers (1999)
    • H. Schift and L. J. Heyderman, in: book series on Nanostructure Science and Technology, Kluwer Academic / Plenum Publishers (1999)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.