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Volumn 364-366 I, Issue , 2008, Pages 607-612
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Fabrication of large-area imprint mold with high-aspect-ratio nanotip arrays of sub-micron diameter
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Author keywords
Electron cyclotron resonance plasma; Nanoimprint; Nanotip
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Indexed keywords
DISPLAY DEVICES;
OPTICAL SYSTEMS;
ELECTRON CYCLOTRON RESONANCE PLASMAS;
NANOIMPRINTS;
NANOLITHOGRAPHY;
DISPLAYS;
LITHOGRAPHY;
OPTICAL INSTRUMENTS;
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EID: 38849130593
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (1)
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References (15)
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