Experimental characterization of a density peak at low magnetic fields in a helicon plasma source

Plasma Sources Science and Technology

Volumn 16, Issue 4, 2007, Pages 734-741

  Sato, G ^a,b   Oohara, W ^a   Hatakeyama, R ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC FIELDS; PHASE VELOCITY; PLASMA DENSITY; PLASMA SOURCES; WAVELENGTH;

ANTENNA-EXCITED FIELDS; DENSITY PEAKS; DENSITY-PEAK CONDITION; HELICON PLASMA SOURCE;

HELICONS;

EID: 38849104422     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/4/007     Document Type: Article

References (31)

1. Boswell R W and Chen F F 1997 IEEE Trans. Plasma Sci. 25 1229
2. Chen F F and Boswell R W 1997 IEEE Trans. Plasma Sci. 25 1245
3. Chen F F 1992 J. Vac. Sci. Technol. A 10 1389
4. Degeling A W, Jung C O, Boswell R W and Ellingboe A R 1996 Phys. Plasmas 3 2788
5. Cheetham A D and Rayner J P 1998 J. Vac. Sci. Technol. A 16 2777
6. Lho T, Hershkowitz N, Miller J, Steer W and Kim G H 1998 Phys. Plasmas 5 3115
7. Carter C and Khachan J 1999 Plasma Sources Sci. Technol. 8 432
8. Shinohara S and Soejima T 1998 Plasma Phys. Control. Fusion 40 2081
9. Chen F F, Jiang X, Evans J D, Tynan G and Arnush D 1997 Plasma Phys. Control. Fusion 39 A411
10. Chen F F 2003 Phys. Plasmas 10 2586
11. Cho S 2006 Phys. Plasmas 13 033504
12. Shoji T, Sakawa Y, Nakazawa S, Kadota K and Sato T 1993 Plasma Sources Sci. Technol. 2 5
13. Shamrai K P and Taranov V B 1996 Plasma Sources Sci. Technol. 5 474
14. Trivelpiece A W and Gould R W 1959 J. Appl. Phys. 30 1784
15. Sakawa Y, Kunimatsu H, Kikuchi H, Fukui Y and Shoji T 2004 Phys. Plasmas 11 286
16. Blackwell D D, Madziwa T G, Arnush D and Chen F F 2002 Phys. Rev. Lett. 88 145002
17. Sudit I D and Chen F F 1996 Plasma Sources Sci. Technol. 5 43
18. Miljak D G and Chen F F 1998 Plasma Sources Sci. Technol. 7 61
19. Watari T et al 1978 Phys. Fluids 21 2076
20. Stix T H 1962 Theory of Plasma Waves (New York: McGraw-Hill)
21. Sato G, Oohara W and Hatakeyama R 2006 J. Phys. Soc. Japan 75 043501
22. Degeling A W and Boswell R W 1997 Phys. Plasmas 4 2748
23. Mouzouris Y and Scharer J E 1998 Phys. Plasmas 5 4253
24. Chen F F 1991 Plasma Phys. Control. Fusion 33 339
25. Chen F F 2001 Phys. Plasmas 8 3008
26. Chen R T S and Hershkowitz N 1998 Phys. Rev. Lett. 80 4677
27. Scharer J, Degeling A, Borg G and Boswell R 2002 Phys. Plasmas 9 3734
28. Tysk S M, Denning C M, Scharer J E and Akhtar K 2004 Phys. Plasmas 11 878
29. Boswell R W 1984 Plasma Phys. Control. Fusion 26 1147
30. Zhu P and Boswell R W 1989 Phys. Rev. Lett. 63 2805
31. Kwak J G, Kim S K and Cho S 2000 Phys. Lett. A 267 384