Reliability analysis of self-repairable MEMS accelerometer

Proceedings - IEEE International Symposium on Defect and Fault Tolerance in VLSI Systems

Volumn , Issue , 2006, Pages 236-244

  Xiong, Xingguo ^a   Wu, Yu Liang ^b   Jone, Wen Ben ^c  

^a UNIVERSITY OF BRIDGEPORT   (United States)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

^c University of Cincinnati   (United States)

Author keywords

Fracture probability; MEMS (Microelectromechanical System); Micro accelerometer; Redundancy repair; Reliability

Indexed keywords

ACCELEROMETERS; BUILT-IN SELF TEST; RELIABILITY;

FRACTURE PROBABILITY; MICRO-ACCELEROMETER; REDUNDANCY REPAIR;

MEMS;

EID: 38749128002     PISSN: 15505774     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/DFT.2006.54     Document Type: Conference Paper

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