The influence of surface roughness on the angular dependence of the sputter yield

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 145, Issue 3, 1998, Pages 320-331

  Kustner M ^a   Eckstein, W ^a   Dose, V ^a   Roth, J ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; ION BEAMS; ION BOMBARDMENT; MONTE CARLO METHODS; SPUTTERING; SURFACE ROUGHNESS; TARGETS;

SPUTTER YIELD;

RADIATION EFFECTS;

EID: 0032208518     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00399-1     Document Type: Article

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