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Volumn 354, Issue 12-13, 2008, Pages 1308-1313
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Preparation and properties of titanium silicide coating glass by CVD
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Author keywords
Chemical vapor deposition; Conductivity; Reflectivity
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
ELECTRIC CONDUCTIVITY;
GLASS;
INORGANIC COATINGS;
REFLECTION;
SUBSTRATES;
SYNTHESIS (CHEMICAL);
TITANIUM COMPOUNDS;
X RAY DIFFRACTION;
ORTHORHOMBIC STRUCTURE;
PRECURSORS;
TITANIUM SILICIDE;
THIN FILMS;
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EID: 38649112028
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2006.11.038 Document Type: Article |
Times cited : (5)
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References (15)
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