Galvanic corrosion of stacked metal gate electrodes during cleaning in HF solutions

Solid State Phenomena

Volumn 134, Issue , 2008, Pages 87-90

  Garaud, Sylvain ^a,b   Vos, Rita ^a   Shamiryan, Denis ^a   Paraschiv, Vasile ^a   Mertens, Paul ^a   Fransaer, Jan ^b   De Gendt, Stefan ^a,b  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Galvanic corrosion; Hardmask removal; Hydrofluoric acid; Metal gate; Wet cleaning

Indexed keywords

EID: 38549181607     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.134.87     Document Type: Conference Paper

References (5)

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5. M. Claes, V. Paraschiv, S. Beckx, et al., Solid State Phenomena 103-104, UCPSS 2004, p. 93.