Low pressure plasma-jet systems and their application for deposition of ceramic thin films

Journal of Optoelectronics and Advanced Materials

Volumn 9, Issue 4, 2007, Pages 875-880

  Hubicka Z ^a   Chichina, M ^a,b   Deyneka, A ^a   Kudrna, P ^a,b   Olejnicek J ^a   Sichova H ^b   Sicha M ^a,b   Jastrabik L ^a   Virostko, P ^a,b   Adamek P ^c   Tichy M ^b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b CHARLES UNIVERSITY   (Czech Republic)

^c UNIVERSITY OF SOUTH BOHEMIA   (Czech Republic)

Author keywords

Ceramic thin films; Langmuir probe; Plasma jet; STO and BSTO layers

Indexed keywords

BARIUM; BARIUM METALLOGRAPHY; BARIUM TITANATE; DEPOSITION; ELECTRON PROBE MICROANALYSIS; ELECTRON TEMPERATURE; ELECTRONS; FREE RADICALS; LANGMUIR PROBES; NEUTRONS; NOZZLES; OPTICAL EMISSION SPECTROSCOPY; PEROVSKITE; PLASMA JETS; SILICON; STRONTIUM; STRONTIUM TITANATES; SUBSTRATES;

CERAMIC THIN FILMS; COMPOSITIONAL GRADIENTS; ELECTRON CONCENTRATION; ELEMENTAL COMPOSITIONS; LOW PRESSURE PLASMA JETS; ROTATIONAL TEMPERATURE; STO AND BSTO LAYERS; TIME RESOLVED MEASUREMENT;

THIN FILMS;

EID: 38549141207     PISSN: 14544164     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (17)

1. L. Bárdoš, S. Berg, and H. Baránková. J. Vac. Sci. Technol. A 11, 1486 (1993).
2. L. Bárdoš and H. Baránková, Surf. Coat. Tech. 46, 463 (2001).
3. L. Soukup et al., Surf. Coat. Tech. 116-9, 321 (1999).
4. Z. Hubička, M. Šícha, L. Pajasová, L. Soukup, L. Jastrabík, D. Chvostová, and T. Wagner, Surf. Coat. Tech. 142, 681 (2001).
5. Z. Hubička, M. Čada, I. Jakubec, J. Bludská, Z. Málková, B. Trunda, P. Ptáček, J. Přidal, L. Jastrabík, Surf. Coat. Tech. 174, 632 (2003).
6. C. Y. Jin, Y. P. Ding, Z. Y. Meng, J. Inorg. Mater. 15, 287 (2000).
7. N. K. Pervez, P. J. Hansen, R. A. York, Appl. Phys. Lett. 85, 4451 (2004).
8. M. Čada, Z. Hubička, P. Adámek, P. Ptáček, H. Šíchová, M. Šícha, L. Jastrabík, Surf. Coat Tech. 174, 627 (2003).
9. P. A. Chatterton, J. A. Rees, W. L. Wu, K. Al Assadi, Vacuum 42, 489 (1991).
10. M. J. Druyvesteyn. Z. Physik 64, 781 (1930).
11. S. Pfau, M. Tichý, Langmuir probe diagnostics of low-temperature plasmas, in Low Temperature Plasma Physics, R. Hippler et al. Eds., Wiley-VCH, Berlin etc., 2001, ISBN 3-527-28887-2, p. 131.
12. O. Bockova, E. A. Sukisjan, Zhurnal prikladnoi spektroskopii 23 (1975) 601 (in Russian).
13. J. Glosík, J. Pavlík, M. Šícha, M. Tichý, Czech. J. Phys. B37, 188 (1987).
14. E. Passoth, J. F. Behnke, C. Csambal, M. Tichý, P. Kudrna, Y.B. Golubovskii, and I.A. Porokhova, J. Phys. D Appl. Phys. 32, 2655 (1999).
15. V. A. Godyak, R. B. Piejak, B. M. Alexandrovich, Plasma Sources Sci. Technol. 1, 36 (1992).
16. E. Stoffels, W.W. Stoffels, K. Tachibana, Rev. Sci. Instrum. 69 (1998) 117.
17. J. Olejníček, Z. Hubička, P. Virostko, A. Deyneka, L. Jastrabík, D. Chvostová, H. Šíchová, J. Pokorný, Integrated Ferroelectrics 81, 1 (2006).