A 0.18-μm CMOS capacitive sensor Lab-on-Chip

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 454-462

  Ghafar Zadeh, Ebrahim ^a   Sawan, Mohamad ^a   Therriault, Daniel ^b  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b DEPARTMENT OF CHEMICAL ENGINEERING   (Canada)

Author keywords

Capacitive sensor; CMOS; Direct write fabrication process; Lab on Chip; Microfluidic packaging

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; MICROFLUIDICS;

CAPACITIVE SENSORS; MICROFLUIDIC PACKAGING;

CHEMICAL SENSORS;

EID: 38349068453     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.10.007     Document Type: Article

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