Microelectronic capacitance transducer for particle detection

IEEE Sensors Journal

Volumn 4, Issue 3, 2004, Pages 364-372

  Evans, Iwan ^a   York, Trevor ^b  

^a Fujitsu Microelectronics Europe   (United Kingdom)

^b UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Microelectronic; Miniature capacitance sensor; Miniaturized tomography; Particle detection

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; ELECTROCHEMICAL ELECTRODES; MICROPROCESSOR CHIPS; MONTE CARLO METHODS; PARTICLE DETECTORS; PRODUCT DESIGN; SENSITIVITY ANALYSIS; SENSORS; SILICON; TRANSDUCERS;

ELECTRODE STRUCTURE; MINIATURE CAPACITANCE SENSORS; MINIATURIZED TOMOGRAPHY; SILICON CHIPS;

MICROELECTROMECHANICAL DEVICES;

EID: 2542438736     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2004.826741     Document Type: Article

References (12)

1. T. A. York, "Status of electrical tomography in industrial applications," J. Electron. Imag., vol. 10, no. 3, pp. 608-619, July 2001.
2. B. D. Grieve, Q. Smit, R. Mann, and T. A. York, "The application of electrical resistance T tomography to a large volume production pressure filter," in Proc. 2nd World Congr. Industrial Process Tomography, 2001, pp. 175-182.
3. T. A. York, I. G. Evans, Z. Pokusevski, and T. Dyakowski, "Particle detection using an integrated capacitance sensor," Sens. Actuators A, vol. 92, no. 1-3, pp. 74-79, Aug. 2001.
4. Z. Pokusevski, I. G. Evans, T. A. York, and T. Dyakowski, "A capacitance sensor for detecting the presence of fine droplets in a lean gas-liquid flow," in Symp. Dispersed Flows in Combustion, Incineration, and Propulsion Systems, Orlando, FL, Nov. 5-11, 2000.
5. S. Pilla, J. A. Hamida, and N. S. Sullivan, "Very high sensitivity AC capacitance bridge for the dielectric study of molecular solids at low temperatures," Rev. Sci. Instrum., vol. 70, no. 10, pp. 4055-4058, Oct. 1999.
6. S. M. Huang, C. G. Xie, R. Thorn, D. Snowden, and M. S. Beck, "Design of sensor electronics for electrical capacitance tomography," in Proc. Inst. Elect. Eng., vol. 139, Feb. 1992, pp. 83-88.
7. W. K. Harteveld, P. A. van Halderen, R. F. Mudde, C. M. van den Bleek, H. E. A. van den Akker, and B. Scarlett, "A fast active differentiator capacitance transducer for electrical capacitance tomography," in Proc. 1st World Congr. Industrial Process Tomography, 1999, pp. 571-574.
8. W. Q. Yang and T. A. York, "A new AC-based capacitance tomography system," in Proc. Inst. Elect. Eng., vol. 146, Jan. 1999, pp. 47-53.
9. F. M. L. Van Der Goes and G. C. M. Meijer, "A novel low-cost capacitive-sensor interface," IEEE Trans. Instrum. Meas., vol. 45, pp. 536-540, Apr. 1996.
10. C. Ghidini, D. Marioli, E. Sardini, and A. Taroni, "A 15 ppm resolution measurement system for capacitance transducers," Meas. Sci. Technol., vol. 7, no. 12, pp. 1787-1792, Dec. 1996.
11. J. Chen, D. Sylvester, and C. Hu, "An on-chip, interconnect capacitance characterization method with sub-femto-farad resolution," IEEE Trans. Semiconduct. Manufact., vol. 11, pp. 204-210, May 1998.
12. P.E. Allen and D.R. Holdberg, CMOS Analog Circuit Design. Oxford, U.K.: Oxford Univ. Press, 1987.