Carbon nanotubes grown by catalytic CVD on silicon based substrates for electronics applications

Materials Science Forum

Volumn 539-543, Issue PART 1, 2007, Pages 669-674

  Rizzoli, R ^a   Angelucci, R ^a   Guerri, S ^a   Parisini, A ^a   Veronese, G P ^b   Vinciguerra, V ^c   Bevilacqua, M F ^d  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c STMICROELECTRONICS   (Singapore)

^d STMICROELECTRONICS   (Italy)

Author keywords

Carbon nanotubes; Catalyst; CVD; Nanoelectronics

Indexed keywords

CATALYST ACTIVITY; CHEMICAL VAPOR DEPOSITION; GROWTH RATE; NANOELECTRONICS; PARTICLE DETECTORS; SUBSTRATES;

CATALYTIC SYNTHESIS; COLD CATHODE EMITTERS; INTERCONNECTS; PARTICLE-POSITION DETECTORS;

CARBON NANOTUBES;

EID: 38349013557     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-428-6.669     Document Type: Conference Paper

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