Monolithic SU-8 micro-interferometer for biochemical detections

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 299-306

  Shew, B Y ^a   Cheng, Y C ^a   Tsai, Y H ^a  

^a NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

Author keywords

Biosensor; ELISA; Evanescent wave; Interferometer; Optical waveguide; SU 8 resist

Indexed keywords

BIOCHEMICAL ENGINEERING; LITHOGRAPHY; MACH-ZEHNDER INTERFEROMETERS; MICROPROCESSOR CHIPS; OPTICAL WAVEGUIDES; OPTIMIZATION; REFRACTIVE INDEX;

BIOCHEMICAL DETECTIONS; EVANESCENT WAVES;

BIOSENSORS;

EID: 38149034297     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.029     Document Type: Article

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