Optical polarizer integrated with suppression of higher harmonics in the vacuum ultraviolet and soft x-ray spectral regions

Applied Physics Letters

Volumn 92, Issue 1, 2008, Pages

  Yang, Minghong ^a   Cobet, Christoph ^a   Werner, Christoph ^a   Esser, Norbert ^a  

^a ISAS INSTITUTE FOR ANALYTICAL SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; LIGHT POLARIZATION; OPTIMIZATION; PHOTONIC BAND GAP; SYNCHROTRON RADIATION;

CUTOFF EDGE; VACUUM ULTRAVIOLET ELLIPSOMETRY;

HARMONIC ANALYSIS;

EID: 38049054007     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2829796     Document Type: Article

References (24)

1. G. Reichardt, T. Noll, I. Packe, P. Rotter, J. S. Schmidt, and W. Gudat, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 467-468, 462 (2001).
2. J. Bahrdt, G. Reichardt, T. Noll, and W. Gudat, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 467-468, 589 (2001).
3. E. S. Gluskin, E. M. Trakhtenberg, and A. S. Vinogradov, Nucl. Instrum. Methods NUIMAL 0029-554X 10.1016/0029-554X(78)90251-3 152, 133 (1978).
4. Ph. Sainctavit, J. Petiau, A. Manceau, R. Rivallant, M. Belakhovsky, and G. Renaud, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 10.1016/0168-9002(88)90845-5 273, 423 (1988).
5. I. Waki, Y. Hirai, A. Momose, and K. Hayakawa, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1140829 60, 2072 (1989).
6. W. R. Hunter and J. P. Long, Appl. Opt. APOPAI 0003-6935 33, 1264 (1994).
7. T. Imazono, T. Hirono, Y. Saitoh, and K. Sano, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.2140492 76, 126106 (2005).
8. T. Imazono, H. Kimura, and K. Sano, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1844671 76, 023104 (2005).
9. H. Höchst, P. Bulicke, T. Nelson, and F. Middleton, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1145919 66, 1598 (1995).
10. H. Höchst, D. Rioux, D. Zhao, and D. Huber, Phys. Rev. B PRBMDO 0163-1829 65, 06443 (2002).
11. I. Baek, S. Hulbert, and E. Vescovo, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1435822 73, 1491 (2002).
12. S. Naik and G. S. Lodha, Nucl. Instrum. Methods Phys. Res. A NIMAER 0168-9002 10.1016/j.nima.2006.01.036 560, 211 (2006).
13. P. Finetti, D. M. P. Holland, C. J. Latimer, and C. Binns, Nucl. Instrum. Methods Phys. Res. B NIMBEU 0168-583X 10.1016/j.nimb.2003.08.034 215, 565 (2004).
14. W. R. Hunter, Appl. Opt. APOPAI 0003-6935 17, 1259 (1978).
15. T. Maehara, H. Kimura, H. Nomura, M. Yanagihara, and T. Namioka, Appl. Opt. APOPAI 0003-6935 30, 5018 (1991).
16. L. J. Terminello, A. B. McLean, A. Santoni, E. Spiller, and F. J. Himpsel, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1141124 61, 1626 (1990).
17. M. Yanagihara, T. Maehara, H. Nomura, M. Yamamoto, and T. Namioka, Rev. Sci. Instrum. RSINAK 0034-6748 10.1063/1.1143009 63, 1516 (1992).
18. J. Barth, R. L. Johnson, and M. Cardona, Handbook of Optical Constants of Solids II, edited by, Palik, (Academic, San Diego, 1998), p. 213.
19. T. Wethkamp, K. Wilmers, C. Cobet, N. Esser, W. Richter, O. Ambacher, M. Stutzmann, and M. Candona, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.59. 1845 59, 1845 (1999).
20. C. Cobet, N. Esser, J. T. Zettler, W. Richter, P. Waltereit, O. Brandt, K. H. Ploog, S. Peters, N. V. Edwards, O. P. A. Lindquist, and M. Cardona, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.64.165203 64, 165203 (2001).
21. A. Güell, K. Roodenko, F. Yang, K. Hinrichs, M. Gensch, F. Sanz, and J. Rappich, Mater. Sci. Eng., B MSBTEK 0921-5107 10.1016/j.mseb.2006.07.005 134, 273 (2006).
22. K. Tsunoda, S. Adachi, and M. Takahashi, J. Appl. Phys. JAPIAU 0021-8979 10.1063/1.1446231 91, 2936 (2002).
23. Y. Kawabata and S. Adachi, Appl. Surf. Sci. ASUSEE 0169-4332 10.1016/S0169-4332(99)00315-3 152, 177 (1999).
24. N. Esser, M. Rakel, C. Cobet, W. G. Schmidt, W. Braun, and M. Cardona, Phys. Status Solidi B PSSBBD 0370-1972 10.1002/pssb.200541315 242, 2601 (2005).