Determination of electron collision cross sections set for tetramethysilane

Plasma Science and Technology

Volumn 9, Issue 6, 2007, Pages 756-759

  Bordage, Marie Claude ^a  

^a Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; BOLTZMANN EQUATION; ELECTRON TRANSPORT PROPERTIES; SILANES;

ELECTRON COLLISION; TETRAMETHYSILANE;

MOLECULAR INTERACTIONS;

EID: 38049050265     PISSN: 10090630     EISSN: None     Source Type: Journal    
DOI: 10.1088/1009-0630/9/6/28     Document Type: Article

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