SCOPUS 정보 검색 플랫폼

Volumn 527-529, Issue PART 1, 2006, Pages 51-54

Resistivity distribution in undoped 6H-SiC boules and wafers

Author keywords

Compensation; Deep centers; Physical vapor deposition; Shallow impurities; Stoichiometry; Uniformity

Indexed keywords

CRYSTAL GROWTH; HOLE TRAPS; PHYSICAL VAPOR DEPOSITION; STOICHIOMETRY; WAFER BONDING;

COMPENSATION; DEEP CENTERS; ELECTRICAL UNIFORMITY; RESISTIVITY DISTRIBUTION; SHALLOW IMPURITIES;

SILICON CARBIDE;

EID: 37849009024 PISSN: 02555476 EISSN: 16629752 Source Type: Book Series
DOI: 10.4028/0-87849-425-1.51 Document Type: Conference Paper

Times cited : (1)

References (8)

1
- 0038242290
- J. R. Jenny, D. P. Malta, S. G. Muller, A. R. Powell, V. F. Tsvetkov, H. M. Hobgood, R. C Glass, and C. H. Carter: J Electron Mater. 32, (2003) p. 432
- (2003) J Electron Mater , vol.32 , pp. 432
- Jenny, J.R.¹ Malta, D.P.² Muller, S.G.³ Powell, A.R.⁴ Tsvetkov, V.F.⁵ Hobgood, H.M.⁶ Glass, R.C.⁷ Carter, C.H.⁸

2
- 0026237328
- R. Stibal, J. Windscheif and W. Jantz: Semicond. Sci. Technol. 6, (1991) p. 995
- (1991) Semicond. Sci. Technol , vol.6 , pp. 995
- Stibal, R.¹ Windscheif, J.² Jantz, W.³

3
- 0011451973
- G. M. Martin, A. Mittonaeau, D. Pons, A. Mircea and D. W. Woodard: J. Phys. C: Solid State Phys. 13, (1980) p. 3855
- (1980) J. Phys. C: Solid State Phys , vol.13 , pp. 3855
- Martin, G.M.¹ Mittonaeau, A.² Pons, D.³ Mircea, A.⁴ Woodard, D.W.⁵

4
- 21544479762
- H. J. Chung, A.Y. Polyakov, S. W. Huh, S. Nigam, M. Skowronski, M. A. Fanton, and B. Weiland: J. Appl. Phys. 97, (2005) p. 084913
- (2005) J. Appl. Phys , vol.97 , pp. 084913
- Chung, H.J.¹ Polyakov, A.Y.² Huh, S.W.³ Nigam, S.⁴ Skowronski, M.⁵ Fanton, M.A.⁶ Weiland, B.⁷

5
- 20844443825
- Q. Li, A. Y. Polyakov, M. Skowronski, M. A. Fanton, R. C. Cavalero, R. G. Ray, and B. E. Weiland: Appl. Phys. Lett. 86, (2005) p. 202102
- (2005) Appl. Phys. Lett , vol.86 , pp. 202102
- Li, Q.¹ Polyakov, A.Y.² Skowronski, M.³ Fanton, M.A.⁴ Cavalero, R.C.⁵ Ray, R.G.⁶ Weiland, B.E.⁷

6
- 0038302824
- J. Zhang, L. Storasta, J. P. Bergman, N.T. Son and E. Janzén: J. Appl. Phys. 93, (2003) p. 4708
- (2003) J. Appl. Phys , vol.93 , pp. 4708
- Zhang, J.¹ Storasta, L.² Bergman, J.P.³ Son, N.T.⁴ Janzén, E.⁵

7
- 14344277591
- B. Aradi, A. GaIi, P. Deâk, E. Rauls, Th. Frauenheim, and N. T. Son: Mater. Sci. Forum 353-356, (2001) p. 455
- (2001) Mater. Sci. Forum , vol.353-356 , pp. 455
- Aradi, B.¹ GaIi, A.² Deâk, P.³ Rauls, E.⁴ Frauenheim, T.⁵ Son, N.T.⁶

8
- 20744453248
- Q. Li, A. Polyakov, M. Skowronski, E. K. Sanchez, M. J. Loboda, M. A. Fanton, T. Bogart, and R. D. Gamble: J. Appl. Phys. 97, (2005) p. 113705
- (2005) J. Appl. Phys , vol.97 , pp. 113705
- Li, Q.¹ Polyakov, A.² Skowronski, M.³ Sanchez, E.K.⁴ Loboda, M.J.⁵ Fanton, M.A.⁶ Bogart, T.⁷ Gamble, R.D.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.