Charge-state distributions of metallic electron cyclotron resonance plasmas

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 26, Issue 1, 2008, Pages 97-102

  Kumar, P ^a   Rodrigues, G ^a   Lakshmy, P S ^a   Kanjilal, D ^a   Kumar, R ^b  

^a INTER UNIVERSITY ACCELERATOR CENTRE   (India)

^b CH CHARAN SINGH UNIVERSITY   (India)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE TRANSFER; ELECTRON CYCLOTRON RESONANCE; MOMENTUM; PERMANENT MAGNETS; SPUTTERING; VOLTAGE CONTROL;

CHARGE-STATE DISTRIBUTIONS; DIPOLE MAGNETS; PLASMA SPUTTERING;

PLASMAS;

EID: 37849004458     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2823486     Document Type: Article

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