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Volumn 246, Issue 2, 2006, Pages 440-444
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Development of Zn and Eu beams by plasma sputtering
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Author keywords
Charge states; Electron cyclotron resonance ion source; Ion beam; Metallic ion
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Indexed keywords
EUROPIUM;
INERT GASES;
ION BEAMS;
MATRIX ALGEBRA;
NANOSTRUCTURED MATERIALS;
NANOTECHNOLOGY;
OPTICAL PROPERTIES;
PLASMA APPLICATIONS;
RARE EARTH ELEMENTS;
SEMICONDUCTOR MATERIALS;
SPUTTERING;
ZINC;
BEAM ANALYSIS;
CHARGE STATES;
ELECTRON CYCLOTRON RESONANCE ION SOURCE;
METALLIC IONS;
MATERIALS SCIENCE;
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EID: 33646089897
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/j.nimb.2006.01.018 Document Type: Article |
Times cited : (14)
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References (16)
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