Multilayered coatings with alternate ZrN and TiAlN superlattices

Applied Physics Letters

Volumn 91, Issue 25, 2007, Pages

  Li, D J ^a   Cao, M ^a   Deng, X Y ^a   Sun, X ^b   Chang, W H ^b   Lau, W M ^b  

^a TIANJIN NORMAL UNIVERSITY   (China)

^b UNIVERSITY OF WESTERN ONTARIO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COATINGS; ION BEAM ASSISTED DEPOSITION; SUPERLATTICES; TITANIUM COMPOUNDS; ZIRCONIUM COMPOUNDS;

MONOLITHIC COATINGS; MULTILAYERED COATINGS; RULE-OF-MIXTURE; STRAIN OPTIMIZATION;

MULTILAYERS;

EID: 37549013698     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2826284     Document Type: Article

References (12)

1. C. S. Chen, C. P. Liu, C. Y. A. Tsao, and H. G. Yang, Scr. Mater. 51, 715 (2004).
2. J. V. Ramana, S. Kumar, C. David, A. K. Ray, and V. S. Raju, Mater. Lett. 43, 73 (2000).
3. C. P. Liu and H. G. Yang, Mater. Chem. Phys. 86, 370 (2004).
4. S. G. Harris, E. D. Doyle, A. C. Vlasveld, J. Audy, and D. Quick, Wear 254, 166 (2003).
5. F. H. Mei, N. Shao, L. Wei, Y. S. Dong, and G. Y. Li, Appl. Phys. Lett. 87, 011906 (2005).
6. M. Hock, E. Schäffer, W. Döll, and G. Kleer, Surf. Coat. Technol. 163-164, 689 (2003).
7. D. J. Li, M. X. Wang, and J. J. Zhang, Mater. Sci. Eng., A 423, 116 (2006).
8. C. H. Hsu, M. Li. Chen, and K. L. Lai, Mater. Sci. Eng., A 421, 182 (2006).
9. D. J. Li, M. X. Wang, J. J. Zhang, and J. Yang, J. Vac. Sci. Technol. A 24, 966 (2006).
10. Q. Luo and P. Eh. Hovsepian, Thin Solid Films 497, 203 (2006).
11. Y. Y. Chang, D. Y. Wang, and C. Y. Hung, Surf. Coat. Technol. 200, 1702 (2005).
12. M. Ohring, The Materials Science of Thin Films (Academic, New York, 1992), p. 416.