Electrochemical process for micropattern transfer without photolithography: A modeling analysis

Journal of the Electrochemical Society

Volumn 155, Issue 2, 2008, Pages

  Nouraei, S ^a   Roy, S ^a,b  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

^b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; ELECTROCHEMISTRY; MATHEMATICAL MODELS; MICROFABRICATION; PHOTOLITHOGRAPHY; REACTION RATES;

ELECTROCHEMICAL PROCESSES; ELECTROCHEMICAL REACTORS; NONACIDIFIED MEDIA; REACTION DISTRIBUTION;

CHEMICAL REACTORS;

EID: 37549004762     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2806032     Document Type: Article

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