Microscale pattern transfer without photolithography of substrates

Electrochimica Acta

Volumn 51, Issue 5, 2005, Pages 809-819

  Schonenberger I ^a   Roy, S ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Electrochemical etching; Electrochemical micromachining; Microreactors; Microtechnology; Photolithography

Indexed keywords

ANODES; CATHODES; CHEMICAL REACTORS; COPPER; ELECTROLYTES; ETCHING; MICROELECTROMECHANICAL DEVICES;

ELECTROCHEMICAL ETCHING; ELECTROCHEMICAL MICROMACHINING; MICROREACTORS; MICROTECHNOLOGY;

ELECTROCHEMISTRY;

EID: 27644563135     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2005.04.053     Document Type: Conference Paper

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