Simulation of electron optical systems by differential algebraic method combined with Hermite fitting for practical lens fields

Microelectronic Engineering

Volumn 73-74, Issue , 2004, Pages 90-96

  Wang, Liping ^a   Rouse, John ^a   Liu, Haoning ^a   Munro, Eric ^a   Zhu, Xieqing ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

Aberrations; Automatic differentiation; Differential algebra; Electron lens design software; Electron optics

Indexed keywords

ABERRATIONS; ALGEBRA; C (PROGRAMMING LANGUAGE); COMPUTER PROGRAMMING; COMPUTER SIMULATION; ELECTRIC FIELDS; ELECTRON BEAMS; ELECTRON OPTICS; MAGNETIC FIELDS; MATHEMATICAL MODELS; OPTICAL INSTRUMENT LENSES; SOFTWARE ENGINEERING;

ABERRATION ANALYSIS; AUTOMATIC DIFFERENTIATION; DIFFERENTIAL ALGEBRA (DA); ELECTRON LENS DESIGN SOFTWARE;

OPTICAL SYSTEMS;

EID: 17344377821     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(04)00079-6     Document Type: Conference Paper

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