Simulation methods for multipole imaging systems and aberration correctors

Ultramicroscopy

Volumn 93, Issue 3-4, 2002, Pages 271-291

  Liu, Haoning ^a   Munro, Eric ^a   Rouse, John ^a   Zhu, Xieqing ^a  

^a Munro's Electron Beam Software Ltd   (United Kingdom)

Author keywords

Aberration theory; Coulomb interactions; Electron optical simulation; Hexapole; Multipole systems; Octopole; Primary aberrations; Quadrupole; Secondary aberrations

Indexed keywords

ABERRATIONS; ALGORITHMS; COMPUTER SIMULATION; LEAST SQUARES APPROXIMATIONS; LENSES;

ABERRATION CORRECTORS;

IMAGING SYSTEMS;

ACCURACY; ALGORITHM; ANALYTICAL EQUIPMENT; ANALYTICAL ERROR; ARTICLE; DEVICE; ELECTRON MICROSCOPY; IMAGE ENHANCEMENT; IMAGING SYSTEM; METHODOLOGY; OPTICAL INSTRUMENTATION; REGRESSION ANALYSIS; SIMULATION; THEORY;

EID: 0036890986     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(02)00284-X     Document Type: Article

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