Application of two-dimensional polystyrene arrays in the fabrication of ordered silicon pillars

Journal of Alloys and Compounds

Volumn 450, Issue 1-2, 2008, Pages 512-516

  Zhang, Y J ^a,b   Li, W ^b   Chen, K J ^b  

^a JILIN NORMAL UNIVERSITY   (China)

^b NANJING UNIVERSITY   (China)

Author keywords

2D ordered Si based pillars; Nanosphere lithography

Indexed keywords

LITHOGRAPHY; MONOLAYERS; NANOSPHERES; SILICON;

2D ORDERED SI-BASED PILLARS; NANOSPHERE LITHOGRAPHY; OXYGEN PLASMAS; SILICON PILLARS;

POLYSTYRENES;

EID: 37449019481     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2006.11.184     Document Type: Article

References (21)

1. Chou S.Y., Krauss P.R., and Renstrom P.J. Science 272 (1995) 85
2. Melosh N.A., Boukai A., Diana F., Gerardot B., Badolato A., Petroff P.M., and Heath J.R. Science 300 (2003) 112
3. Harrison C., Park M., and Chaikin P.M. J. Vac. Sci. Technol. B 16 (1998) 544
4. Haynes C.L., and Van Duyne R.P. J. Phys. Chem. B 105 (2001) 559
5. Burmeister F., Schäfle C., Matthes T., Böhmisch M., Boneberg J., and Leiderer P. Langmuir 13 (1997) 2983
6. Tormen M., Businaro L., Altissimo M., Romanato F., Cabrini S., Perennes F., Proietti R., Sun H.-B., Kawata S., and Di Fabrizio E. Microelectron. Eng. 73/74 (2004) 535
7. Li L.P., Lu Y.F., Doerr D.W., Alexander D.R., Shi J., and Li J.C. Nanotechnology 15 (2004) 333
8. Zhu F.Q., Fan D.L., Zhu X.C., Zhu J.G., Cammarata R.C., and Chien C.L. Adv. Mater. 16 (2004) 2155
9. Rybczynski J., Ebels U., and Giersig M. Colloid Surf. A: Physicochem. Eng. Aspects 219 (2003) 1
10. Yin Y., Lu Y., and Xia Y. J. Am. Chem. Soc. 123 (2001) 771
11. Choi D.G., Yu H.K., Jang S.G., and Yang S.M. J. Am. Chem. Soc. 126 (2004) 7019
12. Xia Y., Gates B., Yin Y., and Lu Y. Adv. Mater. 12 (2000) 693
13. Bartlett P.N., Ghanem M.A., El Hallag I.S., Groot P.D., and Zhukov A. J. Mater. Chem. 13 (2003) 2596
14. Huang L., Yu Y., Shen X.F., Li J.W., and Shi B. Acta Polym. Sin. 4 (2001) 523
15. Hulteen J.C., and Van Duyne R.P. J. Vac. Sci. Technol. A 13 (1995) 1553
16. Zong Q., Xie X.M., and Wang X.F. Chem. J. Chin. Univer. Chin. 25 (2004) 2363
17. Almeida R.M., Goncalves M.C., and Portal S. J. Non-Cryst. Solids 345/346 (2004) 562
18. Ye Y.H., LeBlanc F., Haché A., and Truong V.-V. Appl. Phys. Lett. 78 (2001) 52
19. Ye Y.H., Badilescu S., Truong V.-V., Rochon P.A., and Natansohn A. Appl. Phys. Lett. 79 (2001) 872
20. Musil C.R., Jeggle D., Lehmann H.W., Scandella L., Gobrecht J., and Dobeli M. J. Vac. Sci. Technol. B 13 (1995) 2781
21. Gu Z.Z., Uetsuka H., Takahashi K., Nakajima R., Onishi H., Fujishima A., and Sato O. Angew. Chem. Int. Ed. 42 (2003) 894