Micromelting for laser micro polishing of meso/micro metallic components

Proceedings of the ASME International Manufacturing Science and Engineering Conference 2007, MSEC2007

Volumn , Issue , 2007, Pages 363-370

  Perry, Tyler L ^a   Werschmoeller, Dirk ^a   Li, Xiaochun ^a   Pfefferkorn, Frank E ^a   Duffie, Neil A ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LASER MICRO POLISHING; MACRO PARTS; SPATIAL FREQUENCY; SURFACE ACCURACY; SURFACE MICROMELTING;

ELECTROPLATING; FREQUENCY DOMAIN ANALYSIS; MICROFABRICATION; POLISHING; SILICON; SURFACE ROUGHNESS;

LASER APPLICATIONS;

EID: 37349076932     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/MSEC2007-31173     Document Type: Conference Paper

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