Charge induced in 6H-SiC PN diodes by irradiation of oxygen ion microbeams

Materials Science Forum

Volumn 527-529, Issue PART 2, 2006, Pages 1347-1350

  Ohshima, T ^a   Satoh, T ^a   Oikawa, M ^a   Onoda, S ^a   Hirao, T ^a   Itoh, H ^a  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

Charge collection; pn diode; Transient ion beam induced current (TIBIC)

Indexed keywords

BIAS CURRENTS; CHARGE CARRIERS; CHARGE DENSITY; ION BEAMS; SILICON CARBIDE; TRANSIENT ANALYSIS;

CHARGE COLLECTION; MICROBEAMS; PN DIODES; REVERSE BIAS; TRANSIENT ION BEAM INDUCED CURRENT (TIBIC);

SEMICONDUCTOR DIODES;

EID: 37249087925     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-425-1.1347     Document Type: Conference Paper

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