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Volumn 24, Issue 12, 2007, Pages 3481-3484
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Strain field in GaAs/GaN wafer-bonding interface and its microstructure
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
GALLIUM ARSENIDE;
GALLIUM NITRIDE;
HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;
SEMICONDUCTING GALLIUM;
STRAIN;
WAFER BONDING;
BONDING INTERFACES;
CROSS SECTIONAL IMAGE;
ELECTRON BACK SCATTER DIFFRACTION;
ELECTRON BACKSCATTER DIFFRACTION;
KIKUCHI PATTERNS;
ROTATION ANGLES;
SENSITIVE PARAMETER;
STRAIN FIELDS;
III-V SEMICONDUCTORS;
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EID: 37249060292
PISSN: 0256307X
EISSN: 17413540
Source Type: Journal
DOI: 10.1088/0256-307X/24/12/052 Document Type: Article |
Times cited : (2)
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References (10)
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