Photoresist patterned thick-film piezoelectric elements on silicon

Journal of Electroceramics

Volumn 19, Issue 4, 2007, Pages 327-331

  Frood, A J M ^a   Beeby, S P ^a   Tudor, M J ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Doctor blading; PZT; Thick photoresist

Indexed keywords

FILM THICKNESS; PHOTORESISTORS; SILICON WAFERS; THICK FILMS;

DOCTOR BLADING PROCESS; PIEZOELECTRIC ELEMENTS; REGISTRATION ACCURACY; THICK PHOTORESIST;

PIEZOELECTRIC MATERIALS;

EID: 37249058405     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9049-y     Document Type: Article

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