Silicon micromechanical resonator with thick-film printed vibration excitation and detection mechanisms

Sensors and Actuators, A: Physical

Volumn 88, Issue 3, 2001, Pages 189-197

  Beeby, S P ^a   White, N M ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRICITY; RESONATORS; THICK FILM DEVICES; VIBRATIONS (MECHANICAL);

MICROMECHANICAL SILICON BEAM RESONATORS;

SILICON SENSORS;

EID: 0034831552     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00516-1     Document Type: Article

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