Two-step magnetic self-alignment of folded membranes for 3D nanomanufacturing

Microelectronic Engineering

Volumn 84, Issue 5-8, 2007, Pages 1168-1171

  Nichol, Anthony J ^a   Stellman, Paul S ^a   Arora, William J ^a   Barbastathis, George ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

3D nanomanufacturing; Nanomagnets; Self assembly

Indexed keywords

MAGNETIC FIELD EFFECTS; MAGNETIC MATERIALS; MEMBRANES; MOLECULAR ORIENTATION; SELF ASSEMBLY; THREE DIMENSIONAL;

3D NANOMANUFACTURING; NANOMAGNETS;

NANOSTRUCTURES;

EID: 34247610429     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2007.01.217     Document Type: Article

References (5)

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2. Huang Y.S., O Adeyeye A., and Singh N. J. Phys: Condens Matter 17 25 (2005) 3931-3941
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4. Nichol A.J., Arora W.J., and Barbastathis G. J. Vac. Sci. Technol. B 24 (2006) 3128
5. M. Culpepper, S. Kim, P. Petri, CoMeT-Lite: Compliant Mechanism Tool. Design Software developed at MIT. . ©2003.