Thin membrane self-alignment using nanomagnets for three-dimensional nanomanufacturing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3128-3132

  Nichol, Anthony J ^a   Arora, William J ^b   Barbastathis, George ^a  

^a Massachusetts Institute of Technology   (United States)

^b Department of Electrical Engineering and Computer Science   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETIC FIELDS; MAGNETS; MATHEMATICAL MODELS; MEMBRANES; NANOSTRUCTURED MATERIALS;

EXTERNAL MAGNETIC FIELD; MAGNETIC DIPOLE APPROXIMATION; MAGNETIC SATURATION; NANOMAGNETS;

NANOTECHNOLOGY;

EID: 33845271933     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2375084     Document Type: Article

References (6)

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2. W. J. Arora, A. J. Nichol, H. I. Smith, and G. Barbastathis, Appl. Phys. Lett. 88, 053108 (2006).
3. Ling Xial, Wengang Wu, Jun Xu, Yilong Hao, and Yangyuan Wang, 19th International Conference on MicroElectroMechanical System Istanbul, Turkey, 22-26 January 2006 (unpublished).
4. K. Aoki and Y. Aoyagi, Nat. Mater. 2, 117 (2003).
5. Y. S. Huang, A. O. Adeyeye, and N. Singh, J. Phys.: Condens. Matter 17, 3931 (2005).
6. O. Cugat, J. Delamare, and G. Reyne, IEEE Trans. Magn. 39 (6), 3607 (2003).