Extracting the Boersch effect contribution from experimental energy spread measurements for Schottky electron emitters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2049-2054

  Bronsgeest, M S ^a   Barth, J E ^a   Schwind, G A ^b   Swanson, L W ^b   Kruit, P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOERSCH EFFECT; POTENTIAL GRADIENT; SCHOTTKY ELECTRON EMITTERS;

COULOMB INTERACTIONS; ELECTRON BEAMS; ELECTRON GUNS; PARAMETER ESTIMATION; VELOCITY MEASUREMENT;

ELECTRON EMISSION;

EID: 37149007355     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2794067     Document Type: Article

References (22)

1. H. Boersch, Z. Phys. 139, 115 (1954).
2. X. R. Jiang and P. Kruit, Microelectron. Eng. 30, 249 (1996).
3. P. Kruit and G. H. Jansen, in Handbook of Charged Particle Optics, edited by, J. Orloff, (CRC, New York, 1997), Chap., p. 215.
4. G. H. Jansen, Adv. Electron. Electron Phys., Suppl. 21 (1990).
5. F. H. Read and N. J. Bowring, Rev. Sci. Instrum. 74, 2280 (2003).
6. F. H. Read and N. J. Bowring, Nucl. Instrum. Methods Phys. Res. A 519, 196 (2004).
7. E. Munro, SOURCEBOERSCH, Munro's Electron Beam Software Ltd. (http://www.mebs.co.uk).
8. L. W. Swanson and G. A. Schwind, in Handbook of Charged Particle Optics, edited by, J. Orloff, (CRC, New York, 1997), Chap., p. 77.
9. H. S. Kim, M. L. Yu, M. G. R. Thomson, E. Kratschmer, and T. H. P. Chang, J. Vac. Sci. Technol. B 15, 2284 (1997).
10. H. S. Kim, M. L. Yu, M. G. R. Thomson, E. Kratschmer, and T. H. P. Chang, J. Appl. Phys. 81, 461 (1997).
11. H. S. Kim, M. L. Yu, E. Kratschmer, B. W. Hussey, M. G. R. Thomson, and T. H. P. Chang, J. Vac. Sci. Technol. B 13, 2468 (1995).
12. S. Sakawa, K. Tsunoda, and Y. Terui, Surf. Interface Anal. 35, 11 (2003).
13. A. E. Bell and L. W. Swanson, Phys. Rev. B 19, 3353 (1979).
14. J. Orloff, L. W. Swanson, and J.-Z. Li, J. Vac. Sci. Technol. B 3, 224 (1985).
15. M. J. Fransen, T. L. van Rooy, P. C. Tiemeijer, M. H. F. Overwijk, J. S. Faber, and P. Kruit, Adv. Imaging Electron Phys. 111, 91 (1999).
16. M. J. Fransen, J. S. Faber, T. L. van Rooy, P. C. Tiemeijer, and P. Kruit, J. Vac. Sci. Technol. B 16, 2063 (1998).
17. W. Knauer, Optik (Stuttgart) 59, 335 (1981).
18. M. G. R. Thomson, J. Vac. Sci. Technol. B 12, 3498 (1994).
19. J. E. Barth and M. D. Nykerk, Nucl. Instrum. Methods Phys. Res. A 427, 86 (1999).
20. J. A. Simpson, Rev. Sci. Instrum. 32, 1283 (1961).
21. A. Modinos, Field, Thermionic, and Secondary Electron Emission Spectroscopy (Plenum, New York, 1984), Chap., p. 1.
22. G. A. Schwind, G. Magera, and L. S. Swanson, J. Vac. Sci. Technol. B 24, 2897 (2006).