Comparison between different imaging modes in focussed ion beam instruments

Microelectronic Engineering

Volumn 30, Issue 1-4, 1996, Pages 249-252

  Jiang, X R ^a,b   Kruit, P ^b  

^a ZHEJIANG UNIVERSITY   (China)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COMPUTER SIMULATION; IMAGING TECHNIQUES; ION BEAMS; MONTE CARLO METHODS; OPTICAL INSTRUMENT LENSES;

COULOMB INTERACTIONS; FOCUSED ION BEAM INSTRUMENTS; IMAGING MODES; MONTE CARLO SIMULATION; STATISTICAL COULOMB EFFECTS;

OPTICAL INSTRUMENTS;

EID: 0029732998     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00238-3     Document Type: Article

References (11)

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2. P. Kruit and X.R. Jiang, Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focussed ion beam column, to be published in J. Vac. Sci. Technol..
3. S. Takashima, JEOL NEWS, Vol.31E, No. 1(19-94), 33.
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9. X.R. Jiang and P. Kruit, An analytical combined calculation of lens aberrations, statistical Coulomb effects and space charge aberrations in charged particle optical columns, to be published.
10. G.H. Jansen, Coulomb Interactions in Particle Beams, Advances in Electronics and Electron Physics, suppl.21 (Academic Press, London, 1991).
11. X.R. Jiang, Analic Program Reference Manual, Particle Optics Research Group, Delft University of Technology, the Netherlands, 1994.