SCOPUS 정보 검색 플랫폼

Volumn 25, Issue 6, 2007, Pages 2312-2316

Visualization of mold filling stages in thermal nanoimprint by using pressure gradients

Author keywords

[No Author keywords available]

Indexed keywords

OPTIMIZATION; PRESSURE GRADIENT; THREE DIMENSIONAL COMPUTER GRAPHICS;

MOLD FILLING; MOVIE SEQUENCES; THERMAL NANOIMPRINTS;

ANIMATION;

EID: 37149003654 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2806972 Document Type: Article

Times cited : (9)

References (11)

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2
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- (2003) Alternative Lithography-Unleashing the Potential of Nanotechnology , pp. 46-76
- Schift, H.¹ Heyderman, L.J.²

3
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- 2nd ed., edited by B.Bhushan (Springer, Berlin
- H. Schift and A. Kristensen, in Handbook of Nanotechnology, 2nd ed., edited by, B. Bhushan, (Springer, Berlin, 2007), pp. 239-278.
- (2007) Handbook of Nanotechnology , pp. 239-278
- Schift, H.¹ Kristensen, A.²

4
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- H. Schift, L. H. Schift, S. Bellini, J. Gobrecht, F. Reuther, M. Kubenz, M. B. Mikkelsen, and K. Vogelsang, Microelectron. Eng. 84, 932 (2007).
- (2007) Microelectron. Eng. , vol.84 , pp. 932
- Schift, H.¹ Schift, L.H.² Bellini, S.³ Gobrecht, J.⁴ Reuther, F.⁵ Kubenz, M.⁶ Mikkelsen, M.B.⁷ Vogelsang, K.⁸

5
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- 0914-9244 10.2494/photopolymer.16.435
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- ImageJ, Free Java image process and analysis tool, http://rsb.info.nih. gov/ij/.

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- Ph.D. thesis, ETH, Zurich
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9
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