Preparation and optical properties of Ta2O5-x thin films

Materials Chemistry and Physics

Volumn 107, Issue 2-3, 2008, Pages 524-527

  Pai, Yi Hao ^a   Chou, Chih Cheng ^a   Shieu, Fuh Sheng ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Optical properties; RF magnetron sputtering; Tantalum pentoxide

Indexed keywords

ATOMIC FORCE MICROSCOPY; FILM THICKNESS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; LIGHT TRANSMISSION; MAGNETRON SPUTTERING; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

GLASS SUBSTRATES; RF MAGNETRON SPUTTERING; TRANSMISSION ELECTRON MICROSCOPE ENERGY DISPERSIVE SPECTROMETER (TEMEDS);

TANTALUM COMPOUNDS;

EID: 36849059129     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchemphys.2007.08.032     Document Type: Article

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