Synthesis of nanocrystalline diamond films by DC plasma-assisted argon-rich hot filament chemical vapor deposition

Diamond and Related Materials

Volumn 17, Issue 1, 2008, Pages 55-59

  Uppireddi, Kishore ^a   Weiner, Brad R ^a   Morell, Gerardo ^a  

^a UNIVERSITY OF PUERTO RICO   (Puerto Rico)

Author keywords

Bias growth; High resolution electron microscopy; Hot filament CVD; Nanocrystalline diamond

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GROWTH RATE; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BOMBARDMENT; NANOCRYSTALLINE MATERIALS; NUCLEATION;

BIAS GROWTH; HYDROGEN CONCENTRATIONS; NANOCRYSTALLINE DIAMOND FILMS; SUBSTRATE TEMPERATURE;

DIAMOND FILMS;

EID: 36749017944     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2007.10.012     Document Type: Article

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