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Volumn 102, Issue 10, 2007, Pages
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Application of gamma distribution in electromigration for submicron interconnects
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
COPPER;
ELECTROMIGRATION;
ESTIMATION;
STATISTICAL METHODS;
LOGNORMAL DISTRIBUTION;
RESISTANCE DEGRADATION PROFILES;
SUBMICRON INTERCONNECTS;
GAMMA RAYS;
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EID: 36649021139
PISSN: 00218979
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2809449 Document Type: Article |
Times cited : (21)
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References (18)
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