Microactuators of free-standing TiNiCu films

Smart Materials and Structures

Volumn 16, Issue 6, 2007, Pages 2651-2657

  Fu, Y Q ^a,c   Luo, J K ^a   Flewitt, A J ^a   Ong, S E ^b   Zhang, S ^b   Du, H J ^b   Milne, W I ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; MAGNETRON SPUTTERING; MARTENSITIC TRANSFORMATIONS; MICROACTUATORS; SHAPE MEMORY EFFECT; THERMAL EFFECTS;

BEAM BENDING; ELECTRICAL HEATING; MICROCAGE ACTUATORS; VERTICAL DISPLACEMENTS;

TITANIUM COMPOUNDS;

EID: 36448978854     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/16/6/070     Document Type: Article

References (22)

1. Carrozza M C, Eisinberg A, Menciassi A, Campolo D, Micera S and Dario P 2000 J. Micromech. Microeng. 10 271-6
2. Luo J K, He J H, Fu Y Q, Flewitt A J, Fleck N A and Milne W I 2005 J. Micromech. Microeng. 15 1406-13
3. Chronis N and Lee L P 2005 J. Microelectromech. Syst. 14 857-63
4. Krulevitch P, Lee A P, Ramsey P B, Trevino J C, Hamilton J and Northrup M A M A 1996 J. Microelectromech. Syst. 5 270-82
5. Miyazaki S and Ishida A 1999 Mater. Sci. Eng. A 273-275 106-33
6. Fu Y Q, Huang W M, Du H J, Huang X, Tan J P and Gao X Y 2001 Surf. Coat. Technol. 145 107-12
7. Fu Y Q, Du H J, Huang W M, Zhang S and Hu M 2004 Sensors Actuators A 112 395
8. Kahn H, Huff M A and Heuer A H 1998 J. Micromech. Microeng. 8 213-21
9. Du H J and Fu Y Q 2004 Surf. Coat. Technol. 176 182-7
10. Huang W M, Hu Y Y and An L 2005 Appl. Phys. Lett. 87 201904
11. Fu Y Q and Du H J 2003 Mater. Sci. Eng. A 342 236-44
12. Quandt E, Halene C, Holleck H, Feit K, Kohl M, Schlomacher P, Skokan A and Skrobanek K D 1996 Sensors Actuators A 53 434-9
13. Gyobu A, Kawamura Y, Horikawa H and Saburi T 1999 Mater. Sci. Eng. A 273-275 749-53
14. Walker J and Gabriel K 1990 Sensors Actuators 21 243-6
15. Luo J K, Flewitt A J, Spearing S M, Fleck N A and Milne W I 2005 J. Micromech. Microeng. 15 1294-302
16. Luo J K, Flewitt A J, Fleck N A, Spearing S M and Milne W I 2005 Appl. Phys. Lett. 85 5748-50
17. Gill J J, Chang D T, Momoda L A and Carman G P 2001 Sensors Actuators A 93 148-54
18. Seguin J L, Bendahan M, Isalgue A, Esteve-Cano V, Carchano H and Torra V 1999 Sensors Actuators 74 65-9
19. Benard W L, Kahn H, Heuer A H and Huff M A 1998 J. Microelectromech. Syst. 7 245-51
20. Makino E, Mitsuya T and Shibata T 2000 Sensors Actuators 79 128-35
21. Xu D, Wang L, Ding G, Zhou Y, Yu A and Cai B 2001 Sensors Actuators A 93 87-92
22. Fu Y Q, Du H J, Zhang S and Ong S E 2004 Thin Solid Films 476 352-7