Capabilities and limitations of paraxial operator approach for modeling of nano-scale feature evaluation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6617, Issue , 2007, Pages

  Normatov, Alexander ^a   Spektor, Boris ^a   Shamir, Joseph ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Dark beam; Microscopy; Modeling; Nano scale

Indexed keywords

GAUSSIAN BEAMS; MATHEMATICAL MODELS; NANOSTRUCTURED MATERIALS; SENSITIVITY ANALYSIS; VECTORS;

COMPUTATION INTENSIVE METHOD; DARK BEAMS; GAUSSIAN BEAM SCANNING MICROSCOPES; PARAXIAL OPERATORS;

LIGHT TRANSMISSION;

EID: 36248960634     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.728543     Document Type: Conference Paper

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