Experimental validation of 20nm sensitivity of Singular Beam Microscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6616, Issue PART 1, 2007, Pages

  Spektor, Boris ^a   Normatov, Alexander ^a   Shamir, Joseph ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Microscopy; Nano scale; Sensitivity; Singular beam

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; LASER APPLICATIONS; NANOTECHNOLOGY; SENSITIVITY ANALYSIS; SIGNAL TO NOISE RATIO;

LASER SCANNING MICROSCOPY; OPTICAL SINGULARITIES; SINGULAR BEAM MICROSCOPY;

LIGHT;

EID: 36249006540     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.728539     Document Type: Conference Paper

References (7)

1. B. Spektor, G. Toker, J. Shamir, M. Friedman, A. Brunfeld, "High resolution surface feature evaluation using multiwavelength optical transforms", in Interferometry XI: Techniques and Analysis, SPIE Proc. 4777, 345-351 (2002).
2. G. Toker, A. Brunfeld, J. Shamir, B. Spektor, E. Cromwell, J. Adam, "In-line optical surface roughness determination by laser scanning", in Interferometry XI: Techniques and Analysis, SPIE Proc. 4777, 323-329 (2002).
3. A. Tavrov, N. Kerwien, R. Berger, H. Tiziani, M. Totzek, B. Spektor, J. Shamir, G. Toker and A. Brunfeld, "Vector simulations of dark beam interaction with nano-scale surface features", in Optical Measurement Systems for Industrial Inspection III, SPIE Proc. 5144, 26-36 (2003).
4. J. F. Nye and M. V. Berry, "Dislocations in Wave Trains", Proc. R. Soc. Lond. A. 336, 165-190 (1974).
5. I.V. Basistiy, MS. Soskin, M.V. Vasnetsov, "Optical wavefront dislocations and their properties", Optics Communications 119, 604-612 (1995).
6. B. Spektor R. Piestun, and J. Shamir, "Dark Beams with a constant notch", Opt. Letters 21, 456-458 (1996).
7. J. Shamir, Optical Systems and Processes, SPIE Press, Bellingham, 1999.