High-resolution surface feature evaluation using multi-wavelength optical transforms

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4777, Issue , 2002, Pages 345-351

  Spektor, Boris ^a   Toker, Gregory ^b   Shamir, Joseph ^a   Friedman, Michael ^a   Brunfeld, Andrei ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b Amsys Ltd   (Israel)

Author keywords

Profilometry; Scanning; Surface feature measurement

Indexed keywords

ALGORITHMS; DATA ACQUISITION; ELECTROMAGNETIC WAVE DIFFRACTION; INTERFEROMETRY; LIGHT SCATTERING; OPTICAL RESOLVING POWER; PROFILOMETRY; SCANNING; SIGNAL RECONSTRUCTION; SURFACE MEASUREMENT; WAVELET TRANSFORMS;

MULTI-WAVELENGTH OPTICAL TRANSFORMS;

OPTICAL SYSTEMS;

EID: 0036417210     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472234     Document Type: Article

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