In-line optical surface roughness determination by laser scanning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4777, Issue , 2002, Pages 323-329

  Toker, Gregory ^a   Brunfeld, Andrei ^a   Shamir, Joseph ^b   Spektor, Boris ^b   Cromwell, Evan F ^c   Adam, Johann F ^c  

^a Amsys Ltd   (Israel)

^b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^c NONE   (Israel)

Author keywords

Profilometry; Scanning; Surface roughness

Indexed keywords

LASER BEAM EFFECTS; LIGHT REFLECTION; OPTICAL CORRELATION; PARAMETER ESTIMATION; PROFILOMETRY; SCANNING; SURFACE ROUGHNESS;

LASER SCANNING;

OPTICAL SYSTEMS;

EID: 0036426328     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.472232     Document Type: Article

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