Research and fabrication of a UV curable polymeric 41 × 41 array-waveguide grating multiplexer

Microwave and Optical Technology Letters

Volumn 49, Issue 12, 2007, Pages 3040-3044

  Chen, C M ^a   Zhang, X Z ^a   Zhang, H M ^a   Zhang, D ^a   Mu, S K ^a   Hou, A L ^a   Zhang, X L ^a   Li, L ^a   Zhang, D M ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Arrayed waveguide grating; Optical waveguide; UV curable polymeric resist; Wavelength division multiplexing

Indexed keywords

ARRAYED WAVEGUIDE GRATINGS; CROSSLINKING; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION; WAVELENGTH DIVISION MULTIPLEXING;

CHANNEL SPACING; POLYMERIC WAVEGUIDES; UV CURABLE POLYMERIC RESISTS;

WAVEGUIDE JUNCTIONS;

EID: 36148994300     PISSN: 08952477     EISSN: None     Source Type: Journal    
DOI: 10.1002/mop.22965     Document Type: Article

References (18)

1. F. Wang, A.Z. Li, W. Sun, Y. Zhao, D.M. Zhang, C.S. Ma, and S.Y. Liu, Polymeric 1 × 32 array waveguide grating multiplexer using cross-linkable fluorinated poly(ether ether ketone) at 1550nm, Opt Mater 28 (2006), 494-497.
2. F. Wang, C. Ma, W. Sun, A. Li, Y. Zhao, Z. Jiang, and D. Zhang, Array waveguide grating multiplexer with high thermal atability on silicon, Opt Laser Technol 37 (2005), 527-531.
3. J.-G. Lim, S.-S. Lee, and K.-D. Lee, Polymeric arrayed waveguide grating using imprint method incorporating a flexible PDMS stamps, Opt Commun (2006).
4. F. Wang, K. Chen, W. Sun, H. Zhang, C. Ma, M. Yi, S. Liu, and D. Zhang, 32-channel arrayed waveguide grating multiplexer using low loss fluorinated polymer operating around 1550 nm,Opt Commun 259 (2006), 665-669.
5. S. Lu, C. Yang, G. Jin, and Z. Zhou, Design and fabrication of a polymeric flat focal field arrayed waveguide grating, Opt Express 13 (2005), 9982-9994.
6. J.-M. Lee, Y.-S. Back, K.-R. Oh, H.-J. Lee, and Y.-S. Kim, Temperature dependence of low loss polymeric AWG, Opt Commun 270 (2007), 189-194.
7. S. Li, C.B. Freidhoff, R.M. Young, and R. Ghodssi, Fabrication of micronozzles using low-temperature wafer-level bonding with SU-8, J Micromech Microeng 13 (2003), 732-738.
8. B. Beche, N. Pelletier, E. Gaviot, R. Hierle, A. Goullet, J.P. Landesman, and J. Zyss, Conception of optical integrated circuits on polymers, Microelectron J 37 (2006), 421-427.
9. N. Pelletier, B. Beche, N. Taham, J. Zyss, L. Camberlein, and E. Gaviot, SU-8 waveguiding interferometric micro-sensor for gage pressure measurement, Sensors Actuators (2006).
10. B. Bilenberg. T. Nielsen, B. Clausen, and A. Kristensen, PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated optics. J Micromech Microeng 14 (2004), 814-818.
11. H.-C. Lin, H.-C. Huang, and S.-L. Tsao, Tolerance analysis of 4 × 4 SU-8 polymer array waveguide grating. Opt Commun 250 (2005), 69-76.
12. K.K. Tung, W.H. Wong, and E.Y.B. Pun, Polymeric optical waveguides using direct ultraviolet photolithography process, Appl Phys A 80 (2005), 621-626.
13. MicroChem, http://www.microchem.com/.
14. MasterBond, http://www.masterbond.com/.
15. A.S. Holland, A. Mitchell, V.S. Balkunje, M.W. Austin, and K. Mukund, Fabrication of raised and inverted SU8 polymer waveguides, Optoelectron Devices Integrat 5644 (2005), 353-356.
16. M. Nordstrom. D.A. Zauner, A. Boisen, and J. Hubner, Monolithic single mode SU-8 waveguides for integrated optics, Microfluidics BioMEMS Medical Microsys IV 6112 (2006).
17. B.Y. Huang, G.T. Paloczi, J.K.S. Poon, and A. Yariv, Demonstration of flexible freestanding all-polymer integrated optical ring resonator devices, Adv Mater 16 (2004). 44-48.
18. A. Holland. C. Cher, G. Rosengarten, and D. Simon, Plasma etching of thermoset polymer films for microchannels, Smart Mater Struct 15 (2006). S104-S111.