Plasma etching of thermoset polymer films for microchannels

Smart Materials and Structures

Volumn 15, Issue 1, 2006, Pages

  Holland, Anthony ^a   Cher, Carla ^a   Rosengarten, Gary ^a   Simon, Darren ^a  

^a RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; DIFFERENTIAL SCANNING CALORIMETRY; FLUORESCENCE; PLASMA ETCHING; POLYMERS;

CHANNEL WALLS; CURING CONDITIONS; THERMOSET POLYMERS;

PLASTIC FILMS;

EID: 31144470479     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/15/1/017     Document Type: Conference Paper

References (20)

1. Harrison D J, Fluri K, Seiler K, Fan Z, Effenhauser C S and Manz A 1993 Science 261 895-7
2. Dhananjay Bhusari H A R, Wedlake M, Padovani A M, Allen Bidstrup S A and Khol P A 2001 Fabrication of air-channel structures for microfluidic, micromechanical and microelectronic applications J. Microelectromech. Syst. 10 400-8
3. Gravesen P, Branebjerg J and Jensen O S 1993 Microfluidics-a review J. Micromech. Microeng. 3 168-82
4. Service R F 1998 Microchip arrays put DNA on the spot Science 282 396-9
5. Mastrangelo C H, Burns M A and Burke D T 1998 Microfabricated devices for genetic diagnostics Proc. IEEE 86 1769-87
6. Moukheiber Z 1998 Forbes 161 76
7. Srinivasan R, Hsing I M, Ryley J, Harold M P, Jensen K F and Schmidt A 1996 Micromachined chemical reactors for surface catalyzed oxidation reactions Solid State Sensor and Actuator Workshop (Hilton Head, SC, June 1996) Technical Digest pp 15-18
8. Soper S A, Ford S M, Qi S, McCarley R L, Kelly K and Murphy M C 2000 Polymetric microelectromechanical systems Anal. Chem. 72 642A-51A
9. Nguyen N-T and Wereley S T 2002 Fundamentals and Applications of Microfluidics (Artech House Microelectromechanical Systems (MEMS) Series) (London: Artech House)
10. Santiago J G et al 1998 A particle image velocimetry system for microfluidics Exp. Fluids 25 316-9
11. Mc Cormick R M, Nelson R J, AlonsoAmigo M G, Benvegnu J and Hooper H H 1997 Microchannel electrophoretic separations of DNA in injection-molded plastic substrates Anal. Chem. 69 2626-30
12. Martynova L, Locascio L E, Gaitan M, Kramer G W, Christensen R G and MacCrehan W A 1997 Fabrication of plastic microfluid channels by imprinting methods Anal. Chem. 69 4783-9
13. Effenhauser C S, Bruin G J M, Paulus A and Ehrat M 1997 Integrated capillary electrophoresis on flexible silicone microdevices: analysis of DNA restriction fragments and detection of single DNA molecules on microchips Anal. Chem. 69 3451-7
14. 2002 Technical Data Sheet-Master Bond Polymer System UV15 (Master Bond Inc.)
15. Rossier J S, Amanda Carnal C V, Lagger G, Gobry V, Girault H H, Michel P and Reymond F 2002 Plasma etched polymer microelectrochemical systems Lab Chip 2 145-50
16. 2002 Plasma Etchers-Technical Brief-Quorum Technologies (East Sussex: Quorum Technologies)
17. Chan C M, Ko T M and Hiraoka H 1996 Polymer surface modification by plasmas and photons Surf. Sci. Rep. 24 1-54
18. Musa S, Sulur N L, Sengo G and Driessen A 2000 Fabrication of polymeric multimode waveguides for application in the local area network and optical interconnects Proc. Symp. IEEE/LEOS Benelux Chapter pp 95-8
19. Lee R E 1979 Microfabrication by ion-beam etching J. Vac. Sci. Technol. 16 164-70
20. Roberts M A, Rossier J S, Bercier P and Girault H H 1997 UV laser machined polymer substrates for the development of microdiagnostic systems Anal. Chem. 69 2035-42