Relationships between material properties of piezo-electric thin films and device characteristics of film bulk acoustic resonators

Thin Solid Films

Volumn 516, Issue 2-4, 2007, Pages 475-480

  Lee, Jin Bock ^a   Cho, Dong Hyun ^b   Kim, Do Young ^b   Park, Chang Kyun ^b   Park, Jin Seok ^b  

^a Samsung Electro Mechanics   (South Korea)

^b Hanyang University   (South Korea)

Author keywords

AIN; Electric biasing; Film bulk acoustic resonator; Frequency response; Oxygen additive; Piezoelectric property; RF magnetron sputtering; Two step deposition; ZnO

Indexed keywords

ACOUSTIC RESONATORS; FREQUENCY RESPONSE; MAGNETRON SPUTTERING; PIEZOELECTRICITY; RADIOFREQUENCY SPECTROSCOPY;

ELECTRIC BIASING; FILM BULK ACOUSTIC RESONATOR; OXYGEN ADDITIVE; PIEZOELECTRIC PROPERTY; RF MAGNETRON SPUTTERING; TWO-STEP DEPOSITION;

THIN FILMS;

EID: 36049048275     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.07.145     Document Type: Article

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