The properties of heavily Al-doped ZnO films by simultaneous re and dc magnetron sputtering

Solid State Phenomena

Volumn 118, Issue , 2006, Pages 305-310

  Lin, Su Shia ^a   Huango, Jow Lay ^b  

^a CHIENKUO TECHNOLOGY UNIVERSITY   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Optical properties; Resistivity; Structure; Surface morphology; Zno:al film

Indexed keywords

ALUMINUM; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SURFACE MORPHOLOGY; ZINC OXIDE;

RADIO FREQUENCY POWER;

OXIDE FILMS;

EID: 36049014521     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-25-6.305     Document Type: Conference Paper

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