The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings

International Journal of Refractory Metals and Hard Materials

Volumn 26, Issue 2, 2008, Pages 120-126

  Wagner, J ^a   Mitterer, C ^b   Penoy, M ^c   Michotte, C ^c   Wallgram, W ^d   Kathrein, M ^d  

^a MATERIALS CENTER LEOBEN FORSCHUNG GMBH   (Austria)

^b UNIVERSITY OF LEOBEN   (Austria)

^c CERATIZIT Luxembourg Sàrl ^*  (Luxembourg)

^d CERATIZIT AUSTRIA GMBH   (Austria)

Author keywords

CVD; Hardness; Structure; TiN; Tribology

Indexed keywords

CHEMICAL VAPOR DEPOSITION; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; SURFACE ROUGHNESS; TITANIUM NITRIDE; WEAR RESISTANCE; X RAY DIFFRACTION;

COATING HARDNESS; DEPOSITION TEMPERATURES; DRY SLIDING; TEXTURED FILMS;

INORGANIC COATINGS;

EID: 36049013340     PISSN: 02634368     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijrmhm.2007.01.010     Document Type: Article

References (31)

1. Ruppi S. Advances in chemically vapour deposited wear resistant coatings. J Phys IV France 11 (2001) 847-859
2. Prengel H.G., Pfouts W.R., and Santhanam A.T. State of the art in hard coatings for carbide cutting tools. Surf Coat Technol 102 (1998) 183-190
3. Rebenne H.E., and Bhat D.G. Review of CVD TiN coatings for wear-resistant applications: deposition processes, properties and performance. Surf Coat Technol 63 (1994) 1-13
4. Sundgren J.-E. Structure and properties of TiN coatings. Thin Solid Films 128 (1985) 21-44
5. Fortuna S.V., Sharkeev Y.P., Perry A.J., Matossian J.N., and Shulepov I.A. Microstructural features of wear-resistant titanium nitride coatings deposited by different methods. Thin Solid Films 377-378 (2000) 512-517
6. Dekker J.P., Van der Put P.J., Veringa H.J., and Schoonman J. A kinetic study of titanium nitride chemical vapor deposition using nitrogen, hydrogen, and titanium tetrachloride. J Electrochem Soc 141 (1994) 787-795
7. Nakanishi N., Mori S., and Kato E. Kinetics of chemical vapor deposition of titanium nitride. J Electrochem Soc 137 (1990) 322-328
8. Shah D.C., and Bhat D.G. Correlation between properties and performance of titanium nitride-coated cemented carbide cutting tools. In: Sudarshan T.S., Bhat D.G., and Jeandin M. (Eds). Surface modification techniques IV (1991), Metallurgical Society, Warrendale 79-95
9. Cheng H.-E., and Wen Y.-W. Correlation between process parameters, microstructure and hardness of titanium nitride films by chemical vapor deposition. Surf Coat Technol 179 (2004) 103-109
10. Hintermann H.E. Adhesion, friction and wear of thin hard coatings. Wear 100 (1984) 381-397
11. Franklin S.E., and Beuger J. A comparison of the tribological behavior of several wear-resistant coatings. Surf Coat Technol 54/55 (1992) 459-465
12. Schintlmeister W., Wallgram W., Kanz J., and Gigl K. Cutting tool materials coated by chemical vapor deposition. Wear 100 (1984) 153-169
13. Ultra-Micro Indentation System. CSIRO Division of Telecommunications and Industrial Physics. Bradfield Rd, West Lindfield, NSW Australia.
14. Birkholz M. Thin film analysis by X-ray scattering (2006), Weinheim/Wiley-VCH
15. Cheng H.-E., Chiang M.-J., and Hon M.-H. Growth characteristics and properties of TiN coating by chemical vapor deposition. J Electrochem Soc 142 (1995) 1573-1578
16. Cheng H.-E., and Hon M.-H. Texture formation in titanium nitride films prepared by chemical vapor deposition. J Appl Phys 79 (1996) 8047-8053
17. Sundgren J.-E., and Hentzell H.T.G. A review of the present state of art in hard coatings grown from the vapor phase. J Vac Sci Technol A 4 (1986) 2259-2279
18. Wokulski Z. Mechanical properties of TiN whiskers. Phys Status Solidi 120 (1990) 175-184
19. Oettel H., Bertram T., Weihnacht V., Wiedemann R., and Von Zitzewitz S. Mechanical behaviour of TiN coatings. Surf Coat Technol 97 (1997) 785-789
20. Ruppi S., and Larsson A. Deposition, microstructure, and properties of nanocrystalline Ti(C, N, O) coatings. J Vac Sci Technol A 21 (2003) 66-75
21. Schintlmeister W., Pacher O., and Pfaffinger K. Structure and strength effects in CVD titanium carbide and titanium nitride coatings. J Electrochem Soc 123 (1976) 924-929
22. x (0.6 < x < 1.2): atomic arrangements, electronic structure, and recent results on crystal growth and physical properties of epitaxial layers. In: Sproul W.D., Thornton J.A., and Greene J.E. (Eds). Physics and chemistry of protective coatings (1986), American Institute of Physics, Universal City 95-115
23. Johansson B.O., Sundgren J.-E., Greene J.E., Rockett A., and Barnett S.A. Growth and properties of single crystal TiN films deposited by reactive magnetron sputtering. J Vac Sci Technol A 2 (1985) 303-307
24. Chou W.-J., Yu G.-P., and Huang J.-H. Mechanical properties of TiN thin film coatings on 304 stainless steel substrates. Surf Coat Technol 149 (2002) 7-13
25. Patsalas P., Chariditis C., and Logothetidis S. The effect of substrate temperature and biasing on the mechanical properties and structure of sputtered titanium nitride thin films. Surf Coat Technol 125 (2000) 335-340
26. Mayrhofer P.H., Kunc F., Musil J., and Mitterer C. A comparative study on reactive and non-reactive unbalanced magnetron sputter deposition of TiN coatings. Thin Solid Films 415 (2002) 151-159
27. Bhushan B. Principles and applications of tribology (1999), John Wiley & Sons, New York
28. Bull S.J., and Rickerby D.S. The abrasive wear resistance of sputter ion plated titanium nitride coatings. Surf Coat Technol 36 (1988) 743-754
29. Wang Y., and Hsu S.M. Wear and wear transition mechanisms of ceramics. Wear 195 (1996) 112-122
30. Rickerby D.S., and Burnett P.J. The wear and erosion resistance of hard PVD coatings. Surf Coat Technol 33 (1987) 191-211
31. Hertzberg R.W. Deformation and fracture mechanics of engineering materials. 4th ed. (1996), John Wiley & Sons, New York