Deposition, microstructure, and properties of nanocrystalline Ti(C,O,N) coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 21, Issue 1, 2003, Pages 66-75

  Ruppi, S ^a   Larsson, A ^a  

^a SECO TOOLS AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CARBIDES; CARBON MONOXIDE; CHEMICAL VAPOR DEPOSITION; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MICROSTRUCTURE; MORPHOLOGY; NANOSTRUCTURED MATERIALS; OXYGEN; PLASTIC DEFORMATION; TRANSMISSION ELECTRON MICROSCOPY; WEAR RESISTANCE;

GRAIN REFINEMENT; NANOCRYSTALLINE COATINGS; REVERSE HALL-PETCH DEPENDENCE; SELECTED AREA ELECTRON DIFFRACTION; SINGLE-LAYER COATINGS; SURFACE QUALITY;

COATINGS;

EID: 0037273350     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1521965     Document Type: Article

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