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Volumn 78, Issue 10, 2007, Pages

XUV laser-plasma source based on solid Ar filament

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; LASER APPLICATIONS; LIGHT EMISSION; PARAMETER ESTIMATION; PLASMA WAVES; X RAY ANALYSIS;

EID: 36049006222     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2801882     Document Type: Article
Times cited : (13)

References (27)
  • 1
    • 36049020915 scopus 로고    scopus 로고
    • See, e.g, San. Jose SPIE, Bellingham, WA
    • See, e.g., SPIE Proceedings of Microlithography, San. Jose (SPIE, Bellingham, WA, 2007).
    • (2007) SPIE Proceedings of Microlithography


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.